Micro/nanofabrication, and MEMS for medical applications

• Research and development of:
  

1. novel unit processes,
   
2. novel integration processes.
   

• Scalable microfabrication of:
  

1. High yield, MEMS devices for medical imaging applications.
   

• In-situ SEM nanomechanical characterization,
  
• Elastic strain engineering,
  
• Understanding, and tuning the material properties for energy and information technology applications.
  

xfrontiers Research Labs at Bilkent University UNAM

MEMS and nanomechanics for energy, and information technology applications