Micro/nanofabrication, and MEMS for medical applications

  • Research and development of:
  1. novel unit processes,
  2. novel integration processes.


  • Scalable microfabrication of:
  1. High yield, MEMS devices for medical imaging applications.
  • In-situ SEM nanomechanical characterization,
  • Elastic strain engineering,
  • Understanding, and tuning the material properties for energy and information technology applications.

xfrontiers Research Labs at Bilkent University UNAM

MEMS and nanomechanics for energy, and information technology applications