A.K. Okyay, N. Bıyıklı, K. Topallı, A. Haider, P. Deminskyi, H. Eren, M. Yilmaz. “A Method for Area Selective Atomic Layer Deposition and Thereof” (January 2017), Republic of Turkey Patent Institute, Application#: 2016/13505.

A. K. Okyay, N. Bıyıklı, K. Topallı, T. Khan, A. Haider, P. Deminskyi, H. Eren, M. Yilmaz. “A Method for Area Selective Atomic Layer Deposition and Thereof” (June 2016), Republic of Turkey Patent Institute, 2016/08790.

Patent No.: US 9,768,113 B2. ​Hayrettin Koymen, Abdullah Atalar, Akif Sinan Tasdelen, M. Yilmaz, Itir Koymen. "High performance sealed-gap capacitive microphone with various gap geometries" (Date of Patent: Aug. 25, 2020)


Patent No.: US 9,768,113 B2. ​Yannick Feurprier, Joe Lee, Lars Liebmann, Yann Mignot, Terry A. Spooner, Douglas M. Tricket, M. Yilmaz. "Self Aligned Via in Integrated Circuit" (Date of Patent: Sep. 19, 2017)

Patent No.: US 9,385,078 B1.​ Yannick Feurprier, Joe Lee, Lars Liebmann, Yann Mignot, Terry A. Spooner, Douglas M. Tricket, M. Yilmaz. "Self Aligned Via in Integrated Circuit" (Date of Patent: Jul. 5, 2016)

Patent No.: US 9,373,582 B1.​ Yannick Feurprier, Joe Lee, Lars Liebmann, Yann Mignot, Terry A. Spooner, Douglas M. Tricket, M. Yilmaz. "Self Aligned Via in Integrated Circuit" (Date of Patent: Jun. 21, 2016)

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